1% S.P. 35-100%
0.35% F.S. 2-35%
Alarms: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
四、美國BROOKS流量計-GF40系列橡膠密封熱式質(zhì)量流量計和控制器產(chǎn)品類型
Mass Flow Controller
區(qū)別
High Accuracy
MultiFlo™ Capability
Compact Size
Suitable for Full Suite of Gases
性能
流量范圍-滿量程容量3 sccm - 50 slpm
精度
1% of SP 35-100%, 0.35% of FS 2-35%
重復性
0.20% SP
線性
±0.5% FS (included in accuracy)
響應時間-常閉
Normally Closed Valve: 300 ms - <1 sec
多氣體多量程MultiFlo™ Available
控制范圍
2-100%
Bin的數(shù)量
10 Bins
閥門關(guān)閉
Closes valve when set point drops below 1.5% full scale
零點穩(wěn)定性<±0.5% FS per year
壓力系數(shù)
0.03% per psi (0-50psi N2)
等級
溫度范圍
5-50oC (41-122oF)
最大壓力
150 psig/10 bar
壓差范圍
3-860 sccm = 7-45 psid
861-7200 sccm = 15-45 psid
7201-55000 sccm = 25-45 psid
*Contact Brooks Technical Support for more information.
漏率1x10-10 atm cc/sec He
機械
密封材料Elastomer Seal
表面拋光32µ inch Ra
接液材料
316 Stainless Steel, Hastelloy C-22, 1707 PH,43055
閥門
Normally Closed
Normally Open
Meter (no valve)
診斷
診斷能力
Available
診斷/服務端口
Available
電氣
模擬通訊
0-5 V, 0-10 V
0-20 mA, 4-20 mA
數(shù)字通訊
DeviceNetTM
EtherCAT®
Profibus®
RS485
電氣連接DeviceNet™: 1 x M12 with threaded coupling nut (B)
EtherCAT®: 5-pin M8 with threaded coupling nut/2 x RJ45
Profibus®: 1 x 15-pin Male Sub-D/1 x 9-pin female Sub-D
RS485: 1 x 15-pin Male Sub-D, (A)
電源-功耗Analog / RS-485
From +12 Vdc to +24 Vdc: 7 Watt/8 Watt
DeviceNet™
From +11 Vdc to +25 Vdc: 7 Watt/8 Watt
EtherCAT® / Profibus®
From +13.5 Vdc to +27 Vdc: 7 Watt/8 Watt
承諾
認證和批準
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
符合環(huán)保要求
RoHS Directive (2011/65/EU)
REACH Directive EC 1907/2006
大小Compact